by Andrew N. Cleland (Author)
The trend to smaller devices is expressed in the transition from microsystems to nanosystems. Nanomechanics is a new and emerging field important for nanoscale devices. This textbook gives a systematic introduction to and survey of nanomechanics.
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This text provides an introduction, at the level of an advanced student in engineering or physics, to the field of nanomechanics and nanomechanical devices. It provides a unified discussion of solid mechanics, with notation consistent with modern convention. A discussion of electrical transducer applications is included, covering such topics as piezoresistance and piezoelecticity. The text includes a discussion of fundamental and spurious sources of noise, and how these sources affect both the amplitude and phase of a mechanical resonator. A brief discussion of nonlinearity in mechanical systems is given. Demonstrated applications of these devices, as well as an introduction to fabrication techniques, are also discussed; a primer on optical as well as electron beam lithography is given in two concise chapters. The text concludes with an overview of potential future technologies, including a discussion of carbon nanotubes and other molecular assemblies.