by Stephen Beeby (Author)
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
Number of Pages: 269
Dimensions: 0.77 x 10.38 x 7.26 IN
Illustrated: Yes
Publication Date: April 30, 2004